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Positioning

Requirement:

The On-Line SVT Monitoring system monitors the calibration of position and orientations of all wafers.

Justification:

These positions and angles are at the basis of the hit position determination for tracking. Accuraet tracking requires they be known to an accuracy of a few tens of microns.

Requirement:

statement of requirement

Justification:

justification of requirement



Claude Andre Pruneau
Thu Oct 12 18:01:54 EDT 1995